Laser ablation and micromachining with ultrashort laser pulses

TLDR

The mechanisms of ultrashort‑pulse laser ablation are discussed, highlighting differences from long pulses, the high intensity and precise breakdown threshold, reduced fluence, limited heat‑affected volume, and their application in precision micromachining of various materials. The authors present femtosecond laser pulse micromachining results, comparing them with long pulses. Ultrashort‑pulse laser micromachining offers wide applications requiring micrometer and submicrometer feature sizes.

Abstract

The mechanisms of ultrashort-pulse laser ablation of materials are discussed, and the differences to that of long laser pulses are emphasized. Ultrashort laser pulses offer both high laser intensity and precise laser-induced breakdown threshold with reduced laser fluence. The ablation of materials with ultrashort pulses has a very limited heat-affected volume. The advantages of ultrashort laser pulses are applied in precision micromachining of various materials. Some femtosecond laser pulse micromachining results, including comparison with long pulses, are presented. Ultrashort-pulse laser micromachining may have a wide range of applications where micrometer and submicrometer feature sizes are required.