Silicon template fabrication for imprint process with good demolding characteristics

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Study of the demolding process—implications for thermal stress, adhesion and friction control

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Fabrication of Si mold with smooth side wall by new plasma etching process

Hiroaki Kawata, Masaaki Yasuda, Yoshihiko Hirai · Microelectronic Engineering · 2007 · 26 citations

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A novel deep etching technology for Si and quartz materials

Yasuhiro Morikawa, Tooru Koidesawa, Toshio Hayashi et al. · Thin Solid Films · 2006 · 15 citations

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