Concepedia

Franz Laermer

FL

Statistics

Publications

8

Citations

393

H-Index

8

Active since

2003

Affiliations

Robert Bosch (Germany)(Current)

University of Freiburg

Saarland University

Franz Laermer is an author at Robert Bosch (Germany) specializing in microelectronics, engineering, and microfabrication.

Top concepts

EngineeringMicroelectronicsMicrofabricationInstrumentationElectrical EngineeringApplied PhysicsSurface ScienceElectronic PackagingMechanical EngineeringMaterial Science

Publications per year

2003–2020

8

Publications

8

Challenges, developments and applications of silicon deep reactive ion etching

Franz Laermer, Andrea Urban · Microelectronic Engineering · 2003 · 223 citations

Electrical Engineering, Ion Implantation, Engineering +8

MEMS at Bosch – Si plasma etch success story, history, applications, and products

Franz Laermer, Andrea Urban · Plasma Processes and Polymers · 2019 · 36 citations

Engineering, Mechanical Engineering, Microelectromechanical Systems +17

Milestones in deep reactive ion etching

Franz Laermer, Andrea Urban · 2005 · 35 citations

Bosch Drie, Electrical Engineering, Wafer Scale Processing +14

Fusing MEMS technology with lab-on-chip: nanoliter-scale silicon microcavity arrays for digital DNA quantification and multiplex testing

Daniel Podbiel, Franz Laermer, Roland Zengerle et al. · Microsystems & Nanoengineering · 2020 · 30 citations · Full text

A new capacitive type MEMS microphone

Christina Leinenbach, Kathrin van Teeffelen, Franz Laermer et al. · 2010 · 24 citations

Engineering, Mixed-signal Integrated Circuit, Mechatronics +10

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