Christina Leinenbach

Processing of MEMS gyroscopes on top of CMOS ICs

Ann Witvrouw, Ankit Nalin Mehta, Agnes Verbist et al. · 2005 · 28 citations

Engineering, Electrical Engineering, Microelectromechanical Systems +12

A new capacitive type MEMS microphone

Christina Leinenbach, Kathrin van Teeffelen, Franz Laermer et al. · 2010 · 25 citations

Engineering, Electrical Engineering, Manufacturing Engineering +17

A novel sacrificial layer technology based on highly selective etching of silicon-germanium in CLF3

Christina Leinenbach, H. Seidel, Tino Fuchs et al. · 2007 · 21 citations

Engineering, Materials Engineering, Materials Science +17

A 10 μm thick poly-SiGe gyroscope processed above 0.35 μm CMOS

Andreas Scheurle, Tino Fuchs, Kersten Kehr et al. · 2007 · 18 citations

Engineering, Electrical Engineering, Instrumentation +12