Concepedia

Andreas Scheurle

AS

2

Publications

50

Citations

2

H-Index

2007

Active since

Affiliations

Klinik Schillerhöhe(Current)

Andreas Scheurle is an author at Klinik Schillerhöhe specializing in instrumentation, mechanical engineering, and engineering.

Top concepts

EngineeringInstrumentationMicroelectronicsMicrofabricationMechanical EngineeringSensors3D PrintingCalibrationMechatronicsSensor Design

Publications per year

2007–2017

2

Publications

2

Advanced surface micromachining process — A first step towards 3D MEMS

Jochen Reinmuth, Arnd Kälberer, Andreas Scheurle et al. · 2017 · 32 citations

Mass-produced Inertial Mems, Engineering, Mechanical Engineering +20

A 10 &#x03BC;m thick poly-SiGe gyroscope processed above 0.35 &#x03BC;m CMOS

Andreas Scheurle, Tino Fuchs, Kersten Kehr et al. · 2007 · 18 citations

Biomedical Sensors, Engineering, Sensors +15

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