Statistics
Publications
1
Citations
15
H-Index
1
Active since
2006
Tooru Koidesawa is an author specializing in engineering, materials engineering, and quartz.
Publications per year
2006–2006
1
1
A novel deep etching technology for Si and quartz materials
Yasuhiro Morikawa, Tooru Koidesawa, Toshio Hayashi et al. · Thin Solid Films · 2006 · 15 citations
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