X-ray photoelectron spectroscopy and grazing incidence X-ray reflectivity study of silicon nitride thin films

Thin film and surface characterization by specular X-ray reflectivity

Eric Chason, Thomas Mayer · Critical reviews in solid state and materials sciences/CRC critical reviews in solid state and materials sciences · 1997 · 256 citations

Natural Sciences, Materials Engineering, Materials Science +17

The preparation, characterization and applications of silicon nitride thin films

C.E. MOROSANU · Thin Solid Films · 1980 · 171 citations

Natural Sciences, Materials Engineering, Materials Science +12

Advances in deposition processes for passivation films

Werner Kern, Richard S. Rosler · Journal of Vacuum Science and Technology · 1977 · 155 citations

Natural Sciences, Materials Engineering, Materials Science +17

Topology of Silicon Structures with Recessed SiO2

E. Bassous, H.N. Yu, V. Maniscalco · Journal of The Electrochemical Society · 1976 · 88 citations

Engineering, Electrical Engineering, Materials Science +17

Application of asymmetrical Gaussian/Lorentzian mixed function for X-ray photoelectron curve synthesis

Isao Kojima, Masayasu Kurahashi · Journal of Electron Spectroscopy and Related Phenomena · 1987 · 83 citations

Natural Sciences, Chemistry, Materials Science +5