Concepedia

Richard S. Rosler

RS

6

Publications

412

Citations

6

H-Index

1968

Active since

Affiliations

RCA (United States)(Current)

Richard S. Rosler is an author at RCA (United States) specializing in applied physics, engineering, and surface science.

Top concepts

EngineeringApplied PhysicsSurface ScienceMaterial ScienceThin FilmsChemical EngineeringSemiconductorsMicroelectronicsMaterials EngineeringHydrogen

Publications per year

1968–1988

6

Publications

6

Advances in deposition processes for passivation films

Werner Kern, Richard S. Rosler · Journal of Vacuum Science and Technology · 1977 · 155 citations

Materials Science, Surface Technology, Electrical Engineering +13

Hydrogen content of a variety of plasma-deposited silicon nitrides

Ray Chow, W. A. Lanford, Keming Wang et al. · Journal of Applied Physics · 1982 · 134 citations

Chemical Engineering, Engineering, Hydrogen Transition +14

Impingement of gas jets on liquid surfaces

Richard S. Rosler, George H. Stewart · Journal of Fluid Mechanics · 1968 · 53 citations

Plasma-enhanced CVD of titanium silicide

Richard S. Rosler, George Engle · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1984 · 25 citations

Engineering, Integrated Circuits, Thin Film Process Technology +17

Tungsten chemical vapor deposition characteristics using SiH4 in a single wafer system

Richard S. Rosler, J. Mendonca, M. J. Rice · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1988 · 24 citations

Materials Engineering, Semiconductors, Materials Science +13

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