Concepedia

George Engle

GE

1

Publications

25

Citations

1

H-Index

1984

Active since

Affiliations

ASM International(Current)

George Engle is an author at ASM International specializing in engineering, semiconductors, and applied physics.

Top concepts

Thin FilmsEngineeringSemiconductorsApplied PhysicsSurface ScienceMaterial ScienceMicroelectronicsCrystalline DefectsIntegrated CircuitsSolar Cell Materials

Publications per year

1984–1984

1

Publications

1

Plasma-enhanced CVD of titanium silicide

Richard S. Rosler, George Engle · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1984 · 25 citations

Engineering, Integrated Circuits, Thin Film Process Technology +17

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