The preparation, characterization and applications of silicon nitride thin films

Measurement of the thickness and refractive index of very thin films and the optical properties of surfaces by ellipsometry

Frank L. McCrackin, Robert R. Stromberg, Harold L. Steinberg · Journal of Research of the National Bureau of Standards Section A Physics and Chemistry · 1963 · 618 citations · Full text

Natural Sciences, Chemistry, Materials Science +17

Current Transport and Maximum Dielectric Strength of Silicon Nitride Films

Simon M. Sze · Journal of Applied Physics · 1967 · 476 citations

Engineering, Materials Engineering, Materials Science +17

Optical Properties of Silicon Nitride

Herbert R. Philipp · Journal of The Electrochemical Society · 1973 · 466 citations

Natural Sciences, Materials Science, Physics +17

Investigation of thermally oxidised silicon surfaces using metal-oxide-semiconductor structures

Andrew S. Grove, B. E. Deal, E. H. Snow et al. · Solid-State Electronics · 1965 · 416 citations

Engineering, Materials Engineering, Materials Science +14

Principles and applications of ion beam techniques for the analysis of solids and thin films

J. W. Mayer, M‐A. Nicolet, T.M. Buck et al. · Thin Solid Films · 1973 · 332 citations

Natural Sciences, Materials Science, Physics +12