Concepedia

Advanced metallization concepts and impact on reliability

Meike Hauschildt, Bernd Hintze, Martin Gall, F. Koschinsky, T. Bolom, Markus Nopper, Armand Beyer, Oliver Aubel, G. Talut, Ehrenfried Zschech

Japanese Journal of Applied Physics · 2014 · 12 citations · 43 references

DOI

Concepts

Abstract

Art.05GA11, 10 S.

References

43

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Comprehensive study of the resistivity of copper wires with lateral dimensions of 100 nm and smaller

W. Steinhögl, G. Schindler, G. Steinlesberger et al. · Journal of Applied Physics · 2004 · 530 citations

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