Fast three-dimensional laser micromachining of silicon for microsystems

Silicon nanostructures produced by laser direct etching

Matthias Müllenborn, H. Dirac, J. W. Petersen · Applied Physics Letters · 1995 · 40 citations · Full text

Engineering, Materials Engineering, Materials Science +17

Stereo laser micromachining of silicon

T. M. Bloomstein, D. J. Ehrlich · Applied Physics Letters · 1992 · 38 citations

Engineering, Manufacturing Engineering, Materials Science +16

Rapid direct writing of high-aspect-ratio trenches in silicon

G. V. Treyz, Raymond J. Beach, Richard M. Osgood · Applied Physics Letters · 1987 · 30 citations

Engineering, Electrical Engineering, Materials Science +14

Rapid direct writing of high-aspect ratio trenches in silicon: Process physics

G. V. Treyz, Raymond J. Beach, Richard M. Osgood · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1988 · 27 citations

Engineering, Materials Engineering, Materials Science +16

Three-dimensional nanostructures by direct laser etching of Si

Matthias Müllenborn, H. Dirac, J. W. Petersen · Applied Surface Science · 1995 · 26 citations

Engineering, Materials Engineering, Materials Science +14