Matthias Müllenborn

Oxidation of hydrogen-passivated silicon surfaces by scanning near-field optical lithography using uncoated and aluminum-coated fiber probes

S. Madsen, Sergey I. Bozhevolnyi, Karen Birkelund et al. · Journal of Applied Physics · 1997 · 67 citations

Optical Materials, Engineering, Aluminum-coated Fiber Probes +18

The first low voltage, low noise differential silicon microphone, technology development and measurement results

Pirmin Rombach, Matthias Müllenborn, U. Klein et al. · Sensors and Actuators A Physical · 2002 · 63 citations

Electrical Engineering, Engineering, Technology Development +9

Optical near-field lithography on hydrogen-passivated silicon surfaces

Steen Hjelm Madsen, Matthias Müllenborn, Karen Birkelund et al. · Applied Physics Letters · 1996 · 56 citations · Full text

Optical Materials, Engineering, Electron-beam Lithography +17

Fabrication and characterization of truly 3-D diffuser/nozzle microstructures in silicon

M. Heschel, Matthias Müllenborn, S. Bouwstra · Journal of Microelectromechanical Systems · 1997 · 51 citations

3-D Diffuser/nozzle Microstructures, Engineering, Mechanical Engineering +16

Reducing the burden of hypoglycaemia in people with diabetes through increased understanding: design of the Hypoglycaemia REdefining SOLutions for better liVEs (Hypo‐RESOLVE) project

Bastiaan E. de Galan, Rory J. McCrimmon, Mark Ibberson et al. · Diabetic Medicine · 2020 · 41 citations · Full text