Concepedia

M. Heschel

MH

Statistics

Publications

5

Citations

134

H-Index

5

Active since

1996

Affiliations

Technical University of Denmark(Current)

Delta (Denmark)

M. Heschel is an author at Technical University of Denmark specializing in materials science, microfabrication, and engineering.

Publications per year

1996–2002

5

Publications

5

Fabrication and characterization of truly 3-D diffuser/nozzle microstructures in silicon

M. Heschel, Matthias Müllenborn, S. Bouwstra · Journal of Microelectromechanical Systems · 1997 · 51 citations · Full text

Engineering, Materials Engineering, Materials Science +17

Conformal coating by photoresist of sharp corners of anisotropically etched through-holes in silicon

M. Heschel, S. Bouwstra · Sensors and Actuators A Physical · 1998 · 45 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +13

Laser direct etching of silicon on oxide for rapid prototyping

Matthias Müllenborn, M. Heschel, Ulrik Larsen et al. · Journal of Micromechanics and Microengineering · 1996 · 14 citations

Engineering, Materials Engineering, Materials Science +16

Stacking technology for a space constrained microsystem

M. Heschel, J.F. Kuhmann, S. Bouwstra et al. · 2002 · 14 citations

Engineering, Electrical Engineering, Microelectromechanical Systems +15

Chip-size-packaged silicon microphones

Matthias Müllenborn, Pirmin Rombach, U. Klein et al. · Sensors and Actuators A Physical · 2001 · 10 citations

1–5 of 5