Concepedia

The first low voltage, low noise differential silicon microphone, technology development and measurement results

Pirmin Rombach, Matthias Müllenborn, U. Klein, Kurt Rasmussen

Sensors and Actuators A Physical · 2002 · 63 citations · 3 references

Concepts

EngineeringElectrical EngineeringMicroelectronicsSemiconductor DevicesSensorsAcoustic MeasurementAcoustic SensorsCmos Circuit DesignLow-noise Circuit DesignNoise In Semiconductor DevicesNoise MeasurementDevice Noise CharacterizationInstrumentation Noise CharacterizationLow-noise AmplificationLow-noise Differential AmplifiersMems MicrophonesMicrophone Preamp MatchingMicrophone SensitivityMicrophones

References

3

Acoustic sensors

G. M. Sessler · Sensors and Actuators A Physical · 1991 · 78 citations

Micromachined double backplate differential capacitive microphone

Jesper Bay, Ole Hansen, S. Bouwstra · Journal of Micromechanics and Microengineering · 1999 · 23 citations

Engineering, Mechanical Engineering, Acoustics +12

A subminiature capacitive movement detector using a composite membrane suspension

Simen Vergote · Sensors and Actuators A Physical · 1992 · 17 citations

Engineering, Electrical Engineering, Mechanical Engineering +13