Concepedia

Mems Microphones

MEMS Microphone is a type of acoustic sensor that integrates a microelectromechanical system-based transducer with on-chip signal conditioning circuitry to convert sound pressure into an electrical signal, distinguished by its miniaturized silicon fabrication and compatibility with semiconductor manufacturing processes.

278

Publications

8.5K

Citations

911

Authors

261

Institutions

Publications per year

2017–2026

91

Variants

Micro-electromechanical Systems Microphones

Parents

Publications

278

Gyrophone: recognizing speech from gyroscope signals

Yan Michalevsky, Dan Boneh, Gabi Nakibly · 2014 · 227 citations

, , +15

An AlN MEMS Piezoelectric Microphone for Aeroacoustic Applications

Matthew D. Williams, Benjamin A. Griffin, Tiffany N. Reagan et al. · Journal of Microelectromechanical Systems · 2012 · 183 citations

, , +17

Noise in MEMS

Faisal Mohd-Yasin, David J. Nagel, Can E. Korman · Measurement Science and Technology · 2009 · 137 citations · Full text

, , +17

A MEMS Condenser Microphone for Consumer Applications

J.W. Weigold, Tim Brosnihan, Joe Bergeron et al. · 2006 · 128 citations

, , +16

A new measurement microphone based on MEMS technology

P.R. Scheeper, B. Nordstrand, Bin Liu et al. · Journal of Microelectromechanical Systems · 2003 · 121 citations

, , +17

1–5 of 278

Authors

911

  1. BK
    Byungki Kim

    Korea University of Technology and Education, South Korea

    10 publications · 236 citations

    10

    h-index

  2. MS
    Mark Sheplak

    University of Florida, United States

    10 publications · 519 citations

    10

    h-index

  3. AD
    Alfons Dehé

    Infineon Technologies (Germany), Germany

    8 publications · 232 citations

    8

    h-index

  4. TN
    Toshikazu Nishida

    University of Florida, United States

    8 publications · 310 citations

    8

    h-index

  5. RN
    Ronald N. Miles

    Binghamton University, United States

    7 publications · 288 citations

    7

    h-index

1–5 of 911

Institutions

261

  1. University of Florida

    Gainesville, United States

    12 h-index

    43 publications

    2.2K citations

  2. Infineon Technologies (Germany)

    Munich, Germany

    11 h-index

    43 publications

    1.1K citations

  3. University of Twente

    Enschede, The Netherlands

    10 h-index

    31 publications

    752 citations

  4. Korea University of Technology and Education

    Cheonan, South Korea

    10 h-index

    21 publications

    514 citations

  5. Darmstadt University of Applied Sciences

    Darmstadt, Germany

    7 h-index

    20 publications

    810 citations

  6. Binghamton University

    Binghamton, United States

    7 h-index

    22 publications

    895 citations

  7. Tsinghua University

    Beijing, China

    6 h-index

    25 publications

    525 citations

  8. Technical University of Denmark

    Kongens Lyngby, Denmark

    6 h-index

    13 publications

    522 citations

1–8 of 261

Venues

  1. Sensors and Actuators A Physical

    37 publications · 1.6K citations

    27

    h-index

  2. The Journal of the Acoustical Society of America

    JASA · 16 publications · 500 citations

    14

    h-index

  3. IEEE Sensors Journal

    14 publications · 445 citations

    13

    h-index

  4. Journal of Microelectromechanical Systems

    13 publications · 667 citations

    13

    h-index

  5. Journal of Micromechanics and Microengineering

    JMM · 12 publications · 261 citations

    12

    h-index

1–5