Benjamin A. Griffin

An AlN MEMS Piezoelectric Microphone for Aeroacoustic Applications

Matthew D. Williams, Benjamin A. Griffin, Tiffany N. Reagan et al. · Journal of Microelectromechanical Systems · 2012 · 179 citations

Aeroacoustics, Biomedical Acoustics, Audio Electroacoustics +22

Thermal Conductivity of Aluminum Scandium Nitride for 5G Mobile Applications and Beyond

Yiwen Song, Carlos Perez, Giovanni Esteves et al. · ACS Applied Materials & Interfaces · 2021 · 97 citations · Full text

Reactive sputter deposition of piezoelectric Sc0.12Al0.88N for contour mode resonators

Michael David Henry, Travis Ryan Young, E Douglas et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2018 · 31 citations · Full text

Materials Engineering, Materials Science, Electrical Engineering +15

Aluminum Nitride Ultrasonic Air-Coupled Actuator

Benjamin A. Griffin, Matthew D. Williams, Chase S. Coffman et al. · Journal of Microelectromechanical Systems · 2011 · 29 citations

Aeroacoustics, Aluminum Nitride, Engineering +14

Near-zero power accelerometer wakeup system

Robert Reger, Bryson Barney, Sean Yen et al. · 2017 · 28 citations · Full text

Low-power Electronics, Electrical Engineering, Energy Harvesting +15