Danish Micro Engineering (Denmark)

AFM probes with directly fabricated tips

Anja Boisen, Ole Hansen, S. Bouwstra · Journal of Micromechanics and Microengineering · 1996 · 88 citations

Engineering, Mechanical Engineering, Microelectromechanical Systems +8

Oxidation of hydrogen-passivated silicon surfaces by scanning near-field optical lithography using uncoated and aluminum-coated fiber probes

S. Madsen, Sergey I. Bozhevolnyi, Karen Birkelund et al. · Journal of Applied Physics · 1997 · 67 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Optical near-field lithography on hydrogen-passivated silicon surfaces

Steen Hjelm Madsen, Matthias Müllenborn, Karen Birkelund et al. · Applied Physics Letters · 1996 · 56 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

An efficient single output fuzzy control algorithm for adaptive applications

Søren Beyer Nielsen · Automatica · 1985 · 22 citations

Engineering, Mathematics, Systems Engineering +8

Laser direct writing of oxide structures on hydrogen-passivated silicon surfaces

Matthias Müllenborn, Karen Birkelund, F. Grey et al. · Applied Physics Letters · 1996 · 21 citations · Full text

Engineering, Materials Engineering, Materials Science +17