Concepedia
Thin Solid Films · 2000 · 34 citations · 2 references
Materials EngineeringMaterials ScienceElectrical EngineeringSimox TechnologyEngineeringNanoelectronicsApplied PhysicsSiliceneSemiconductor Device FabricationStrained-silicon LayerThin Relaxed-sige/sio 2Silicon On InsulatorMicroelectronicsSemiconductor Device
2
SiGe-based semiconductor-on-insulator substrate created by low-energy separation-by-implanted-oxygen
S. Fukatsu, Yukari Ishikawa, Tomohiro Saito et al. · Applied Physics Letters · 1998 · 66 citations
Top Sige Layer, Engineering, Integrated Circuits +16
Undoped epitaxial Si channel n-MOSFET grown by UHV-CVD with preheating
T. Ohguro, Naoharu Sugiyama, Seiji Imai et al. · IEEE Transactions on Electron Devices · 1998 · 24 citations
Electrical Engineering, Oxygen Concentration, Engineering +10