SiGe-based semiconductor-on-insulator substrate created by low-energy separation-by-implanted-oxygen

Abstract

SiGe-based semiconductor-on-insulator (SOI) substrates have been successfully created by the separation-by-implanted-oxygen technique. Low-energy oxygen ion implantation was performed at 25 kV on a strain-relieved Si0.82Ge0.18 virtual substrate grown on Si(001). A good SOI geometry with a 25-nm top SiGe layer was obtained over a dose window of 2–2.5×1017 cm−2, and a flat SiGe surface and sharp SiGe/SiO2 interfaces were achieved at a low substrate temperature of 550°C. Compositional analysis shows that the top SiGe layer nearly conserves the same composition as the underlying alloy substrate.