Review of Scientific Instruments · 1995 · 13 citations · 6 references
Natural SciencesPhysicsBiomedical ImagingDigital ImagingOpticsFourier OpticsInterferometryOptical CoherenceOptical ImagingRadiation Imaging SystemsX-ray OpticsCoherent ImagingIncoherent ImagingSoft X-ray OpticsSpatial CoherenceSpeckle FormationX-ray Imaging OpticsX-ray Imaging PhysicsX-ray Imaging Systems
The spatial coherence of undulator radiation has been modified in a quantitative way, such that when imaging with undulator light of λ=14 nm, the resultant images do not have the usual coherent artifacts of ringing and speckle. To achieve this, we made a soft-x-ray scatter plate which, when inserted into the beam, produces the required amount of divergence and phase shifting to fill the pupil of a 20:1 Schwarzschild camera operating at λ=14 nm. Details of this soft-x-ray scatter plate and its effect on imaging will be presented.
6
Reduction imaging at 14 nm using multilayer-coated optics: Printing of features smaller than 0.1 μm
J. E. Bjorkholm, Jeffrey Bokor, L. Eichner et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1990 · 158 citations
Natural Sciences, Materials Engineering, Materials Science +15