IEEE Circuits and Devices Magazine · 2001 · 47 citations · 7 references
EngineeringMechanical EngineeringMicroelectromechanical SystemsMicroelectronicsMicrofabricationMems DesignMems FabricationMems ModelingMems PackagingMems TestingRf MemsMems Device Packaging
The variety and applications of microelectromechanical systems (MEMS) devices have increased dramatically, improving existing uses or enabling entirely new ones. This article surveys some of the current and projected applications of MEMS.
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H.C. Nathanson, W.E. Newell, R.A. Wickstrom et al. · IEEE Transactions on Electron Devices · 1967 · 1.1K citations
Performance of low-loss RF MEMS capacitive switches
Charles L. Goldsmith, Zhimin Yao, S. Eshelman et al. · IEEE Microwave and Guided Wave Letters · 1998 · 428 citations