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Flash Lamp Supported Deposition of 3C-SiC (FLASiC) – a Promising Technique to Produce High Quality Cubic SiC Layers

DOI

18

Citations

3

References

2004

Year

W. Skorupa, D. Panknin, W. Anwand, M. Voelskow, Gabriel Ferro, Y. Monteil, A. Leycuras, Joerg Pezoldt, Richard McMahon, M. Smith,
Materials science forum

References

YearCitations

Efficient p-type doping of 6H-SiC: Flash-lamp annealing after aluminum implantation

H. Wirth, D. Panknin, W. Skorupa,

Applied Physics Letters

1999

67

A comprehensive study of SiC growth processes in a VPE reactor

Thierry Chassagne, Gabriel Ferro, Didier Chaussende,

Thin Solid Films

2002

45

Improvement of the 3C-SiC/Si Interface by Flash Lamp Annealing

D. Panknin, J. Stoëmenos, Martin Eickhoff,

Materials science forum

2001

16

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