Publication | Closed Access
Improvement of the 3C-SiC/Si Interface by Flash Lamp Annealing
16
Citations
0
References
2001
Year
Materials EngineeringElectrical EngineeringEngineeringNanoelectronicsApplied PhysicsSemiconductor Device FabricationSilicon On InsulatorMicroelectronicsCarbideFlash Lamp Annealing
No additional data available for this publication yet. Check back later!