Concepedia

Publication | Closed Access

A comparison of thermally and photochemically cross-linked polymers for nanoimprinting

DOI

36

Citations

6

References

2003

Year

K. Pfeiffer, F. Reuther, Mathias Fink, G. Gruetzner, Patrick Carlberg, Ivan Maximov, Lars Montelius, J. Seekamp, S. Zankovych, H. Schulz,
Microelectronic Engineering

References

YearCitations

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