A comparison of thermally and photochemically cross-linked polymers for nanoimprinting

Sub-10 nm imprint lithography and applications

Stephen Y. Chou, Peter R. Krauss, Wei Zhang et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1997 · 1.1K citations

Engineering, Electrical Engineering, Materials Science +14

New polymer materials for nanoimprinting

H. Schulz, Hella‐Christin Scheer, Thomas Hoffmann et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 68 citations

Natural Sciences, Materials Engineering, Materials Science +16

Multistep profiles by mix and match of nanoimprint and UV lithography

K. Pfeiffer, Mathias Fink, G. Gruetzner et al. · Microelectronic Engineering · 2001 · 42 citations

Engineering, Manufacturing Engineering, Materials Science +14

Polymer stamps for nanoimprinting

K. Pfeiffer, Mathias Fink, Gisela Ahrens et al. · Microelectronic Engineering · 2002 · 40 citations

Engineering, Materials Engineering, Materials Science +12

Novel linear and crosslinking polymers for nanoimprinting with high etch resistance

K. Pfeiffer, Mathias Fink, G. Bleidießel et al. · Microelectronic Engineering · 2000 · 37 citations

Natural Sciences, Materials Engineering, Materials Science +14