Publication | Closed Access
Multistep profiles by mix and match of nanoimprint and UV lithography
42
Citations
6
References
2001
Year
EngineeringElectron-beam LithographyBeam LithographyMicrofabricationNanotechnologyNanomaterialsFabrication TechniqueApplied PhysicsPattern TransferNanolithographyMultistep Profiles3D PrintingNanolithography MethodUv Lithography
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