Concepedia

Publication | Closed Access

Novel linear and crosslinking polymers for nanoimprinting with high etch resistance

DOI

37

Citations

5

References

2000

Year

K. Pfeiffer, Mathias Fink, G. Bleidießel, G. Gruetzner, H. Schulz, Hella‐Christin Scheer, Thomas Hoffmann, Freddy Gaboriau, Christophe Cardinaud
Microelectronic Engineering

References

YearCitations

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