Concepedia

Synchrotrom radiation X-ray lithography

R.‐P. Haelbich, J. P. Silverman, J. M. Warlaumont

Nuclear Instruments and Methods in Physics Research · 1984 · 31 citations · 9 references

DOI

Concepts

References

9

Microcircuit Engineering '84

M.E. Jones · IEE Proceedings I Solid State and Electron Devices · 1986 · 173 citations

High-Resolution Soft X-Ray Microscopy

R. Feder, Eberhard Spiller, J. Topalian et al. · Science · 1977 · 91 citations

, , +8

A mass-separating focused-ion-beam system for maskless ion implantation

V. Wang, J. W. Ward, R. L. Seliger · Journal of Vacuum Science and Technology · 1981 · 87 citations

, , +10

PMMA copolymers as high sensitivity electron resists

M. Hatzakis · Journal of Vacuum Science and Technology · 1979 · 58 citations

, , +16

Speed enhancement of PMMA resist

Wayne M. Moreau, David J. Merritt, Wendell W. Moyer et al. · Journal of Vacuum Science and Technology · 1979 · 41 citations

, , +17