Author
R.‐P. Haelbich
Also Known As
R. P. Haelbich, R.-P. Haelbich, R.P. Haelbich, R.‐P. Haelbich, Rolf-Peter Haelbich, Rolf‐Peter Haelbich
18
Publications
712
Citations
11
H-Index
40
Concepts
All Affiliations
| # | Concept | H-Index | Publications | Citations |
|---|---|---|---|---|
1 | Engineering | 10 | 10 | 513 |
2 | Applied Physics | 8 | 8 | 395 |
3 | Health Sciences | 2 | 2 | 58 |
4 | Natural Sciences | 1 | 1 | 90 |
5 | Chemistry | 1 | 1 | 90 |
R.‐P. Haelbich
×
12
Publications
687
Citations
11
H-Index
| Year | Citations | |
|---|---|---|
1983 | 157 | |
1980 | 111 | |
1979 | 91 | |
1976 | 90 | |
1976 | 70 | |
1980 | 37 | |
1984 | 31 | |
1983 | 28 | |
1980 | 24 | |
Design and performance of an x-ray lithography beam line at a storage ring R.‐P. Haelbich, J. P. Silverman, W. D. Grobman, Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena EngineeringElectron-beam LithographyPolycapillary OpticsHigh-power LasersSynchrotron Radiation Source | 1983 | 21 |
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