Applied Physics Letters · 1980 · 111 citations · 9 references
Natural SciencesMaterials EngineeringMaterials ScienceOptical MaterialsOpticsThin FilmsOptical Thin FilmsThin Film Optical PropertiesThin-film DepositionX-ray OpticsFilm Thickness ControlReflectivitySoft X-ray OpticsThickness ControlThin Film Thickness ControlX-ray Mirror FabricationX-ray MirrorsX-ray Reflectivity
Multilayer mirrors have been fabricated for various angles of incidence throughout the wavelength range λ=1.5–160 Å. Reflectivity increases by more than a factor 103 over the best single-film reflectors have been obtained. Measured reflectivities are around 10% near normal incidence in the λ=45–160-Å wavelength region and above 50% near grazing incidence (grazing angle 1°–2°) for λ=1.54 Å. The required thickness control has been achieved by monitoring the reflectivity of the films in situ during the deposition.
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