Concepedia

Publication | Closed Access

A plasma immersion ion implantation reactor for ULSI fabrication

DOI

25

Citations

4

References

1991

Year

Xueyu Qian, D. Carl, J. Benasso, N.W. Cheung, M. A. Lieberman, I.G. Brown, James E. Galvin, R.A. MacGill, Michael Current
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

References

YearCitations

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