R.A. MacGill

High current ion source

I.G. Brown, James E. Galvin, R.A. MacGill · Applied Physics Letters · 1985 · 236 citations

Electrical Engineering, Engineering, Physics +8

Metal vapor vacuum arc ion source

I.G. Brown, James E. Galvin, B. Gavin et al. · Review of Scientific Instruments · 1986 · 181 citations

Electrical Engineering, Engineering, Physics +10

Ion charge state distributions in high current vacuum arc plasmas in a magnetic field

André Anders, I.G. Brown, M.R. Dickinson et al. · IEEE Transactions on Plasma Science · 1996 · 172 citations

Electrical Engineering, Engineering, Physics +9

Metal plasma immersion ion implantation and deposition using vacuum arc plasma sources

André Anders, S. Anders, I.G. Brown et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1994 · 157 citations

Materials Engineering, Materials Science, Ion Implantation +12

Improved time-of-flight ion charge state diagnostic

I.G. Brown, James E. Galvin, R.A. MacGill et al. · Review of Scientific Instruments · 1987 · 138 citations

Electrical Engineering, Engineering, Physics +11