Concepedia
Author
J. Benasso
Also Known As
1
Publications
25
Citations
H-Index
2
Concepts
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A plasma immersion ion implantation reactor for ULSI fabrication
Xueyu Qian, D. Carl, J. Benasso, +6
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms
Ion ImplantationEngineeringMicrofabricationUlsi FabricationPlasma Application +1
1991
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