Concepedia

Author

J. Benasso

University of California, Berkeley

Also Known As

J. Benasso

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Publications

25

Citations

1

H-Index

2

Concepts

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University of California, Berkeley
JB

About

J. Benasso is an author at University of California, Berkeley specializing in microfabrication and engineering.

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#ConceptH-IndexPublicationsCitations

1

Engineering

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1

25

2

Microfabrication

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J. Benasso

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1

Publications

25

Citations

1

H-Index

YearCitations

A plasma immersion ion implantation reactor for ULSI fabrication

Xueyu Qian, D. Carl, J. Benasso,

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

1991

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