Applied Physics Letters · 1988 · 221 citations · 4 references
EngineeringPhysicsMetallurgyPlasma PhysicsRadiation PhysicsHigh-temperature PlasmasIon ImplantationPlasma SourcesPlasma Surface TreatmentRadiation HardeningRadiation-resistant MaterialsPlasma Exposure TestingPlasma Immersion Ion ImplantationPlasma Treatment Of MetalsRadiation-induced Surface EffectsSurface Modification By Ion Implantation
Medium density (3×109 cm−3) and high density (3×1012 cm−3) plasmas, generated by low and medium power rf techniques, have been used for the implantation of 10–20 keV nitrogen ions into mild steel targets which were immersed in the plasma and biased to −20 kV. Use of the high density plasma resulted in significant damage to the surface by arcing. At medium densities the nitrogen was implanted to a depth and dose consistent with expectations, there was no arcing damage, and tests showed improved wear and hardness compatible with the level of implantation.
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Distribution of nitrogen implanted in iron as a function of fluence
T. Barnavon, J. Tousset, S. Fayeulle et al. · Radiation Effects · 1983 · 33 citations
Studies of equilibrium in the AAEC rotamak
G. Durance, G.R. Hogg, J. Tendys et al. · Plasma Physics and Controlled Fusion · 1987 · 26 citations