Microelectronic Engineering · 2008 · 13 citations · 4 references
EngineeringMaterials EngineeringMaterials ScienceMicroelectromechanical SystemsMicrofabricationNanotechnologyAtomic Force MicroscopyMicrofabrication ProcessesSurface MicromachiningNanofabricationNanopatterningNanopillars
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