Concepedia
Sensors and Actuators A Physical · 1996 · 39 citations · 8 references
EngineeringElectrical EngineeringInstrumentationMicroelectromechanical SystemsSensorsMems CharacterizationMems DesignMems ResonatorsMems SensorsMicroelectromechanical SensorsCavity ResonatorsResonant MemsResonant Sensors
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Study of electrochemical etch-stop for high-precision thickness control of silicon membranes
B. Kloeck, Scott D. Collins, N. F. de Rooij et al. · IEEE Transactions on Electron Devices · 1989 · 209 citations
Engineering, Materials Engineering, Materials Science +17
The Controlled Etching of Silicon in Catalyzed Ethylenediamine‐Pyrocatechol‐Water Solutions
Arnold Reisman, M. Berkenblit, S. A. Chan et al. · Journal of The Electrochemical Society · 1979 · 208 citations
Natural Sciences, Materials Engineering, Materials Science +17
Performance characteristics of second generation polysilicon resonating beam force transducers
J.J. Sniegowski, H. Guckel, Todd R. Christenson · 1990 · 51 citations
Engineering, Materials Engineering, Materials Science +14
Polysilicon resonant microbeam technology for high performance sensor applications
H. Guckel, Craig W. Rypstat, M. Nesnidal et al. · 2003 · 40 citations
Engineering, Electrical Engineering, Materials Science +17
Superflex: A Synergistic Combination of Vibrating Beam and Quartz Flexure Accelerometer Technology
Brian L. Norling · NAVIGATION Journal of the Institute of Navigation · 1987 · 29 citations
Engineering, Mechanical Engineering, Instrumentation +16