Impact of Zr addition on properties of atomic layer deposited HfO2

Abstract

The impact of Zr addition on microstructure of HfO2 after high temperature processing was investigated using Rutherford backscattering, x-ray diffraction (XRD), transmission electron microscopy, and atomic force microscopy (AFM). The ZrO2 content in the films was varied from ∼25% to 75%. XRD analysis shows that adding >50% ZrO2 leads to partial stabilization of tetragonal phase of the HfxZr1−xO2 alloy. AFM images revealed smaller grains with Zr addition. Conducting AFM showed more uniform and tighter tunneling current distribution in HfxZr1−xO2 compared to HfO2. Constant capacitance-voltage stressing performed on HfO2 and HfxZr1−xO2 metal-oxide-semiconductor capacitors indicated reduced charge trapping with Zr addition.