Metallurgical and Materials Transactions A · 2015 · 22 citations · 10 references
Natural SciencesMaterials EngineeringMaterials ScienceInterface ScienceMaterials CharacterizationSurface ScienceAdhesive BondingHigh-temperature MaterialsMetalsWafer BondingBonding Interface CharacterizationBonding Temperature EffectsBonding-induced DefectsWafer Bonding MaterialsWafer-to-wafer Bonding
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Wafer-level SLID bonding for MEMS encapsulation
Heng Xu, Tommi Suni, Vesa Vuorinen et al. · Advances in Manufacturing · 2013 · 44 citations · Full text