Concepedia

Publication | Open Access

High aspect ratio, 3D structuring of photoresist materials by ion beam LIGA

DOIFull Paper Access

35

Citations

6

References

2003

Year

Frans Munnik, Frédéric Benninger, S. Mikhailov, Arnaud Bertsch, Philippe Renaud, H. Lorenz, Max Gmür
Microelectronic Engineering

References

YearCitations

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