Frédéric Benninger

Statistics

Publications

Citations

H-Index

Active since

2003

Affiliations

École Polytechnique Fédérale de Lausanne(Current)

Frédéric Benninger is an author at École Polytechnique Fédérale de Lausanne specializing in materials engineering, focused ion beam machining, and focused ion beam patterning.

Publications per year

2003–2003

Publications

High aspect ratio, 3D structuring of photoresist materials by ion beam LIGA

Frans Munnik, Frédéric Benninger, S. Mikhailov et al. · Microelectronic Engineering · 2003 · 35 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +12

Creating sub-surface channels in PMMA with ion beam lithography in only one step

Yvan Gonin, Frans Munnik, Frédéric Benninger · Applied Surface Science · 2003 · 20 citations

Engineering, Materials Engineering, Materials Science +14

1–2 of 2