S. Mikhailov

Hydrogen in amorphous and microcrystalline silicon films prepared by hydrogen dilution

U. Kroll, J. Meier, Aqeel Ahmed Shah et al. · Journal of Applied Physics · 1996 · 283 citations · Full text

Engineering, Chemistry, Silicon On Insulator +16

a-C:H thin films deposited by radio-frequency plasma: influence of gas composition on structure, optical properties and stress levels

E. Tomasella, C. Meunier, S. Mikhailov · Surface and Coatings Technology · 2001 · 94 citations

Materials Science, Stress Levels, Optical Materials +10

Nanostructural and mechanical properties of nanocomposite nc-TiC/a-C:H films deposited by reactive unbalanced magnetron sputtering

Thomas Zehnder, P. Schwaller, Frans Munnik et al. · Journal of Applied Physics · 2004 · 85 citations · Full text

Magnetic Properties, Engineering, Thin Film Process Technology +18

Morphology and tribological properties of metal (oxide)–MoS2 nanostructured multilayer coatings

S. Mikhailov, Alan Savan, E. Pflüger et al. · Surface and Coatings Technology · 1998 · 85 citations

Oxide Heterostructures, Materials Science, Tribological Coating +5

Structural, morphological, chemical and tribological investigations of sputter deposited MoS /metal multilayer coatings

M.C. Simmonds, Alan Savan, H. Van Swygenhoven et al. · Surface and Coatings Technology · 1998 · 84 citations