Concepedia

Publication | Closed Access

Micromachining using deep ion beam lithography

DOI

70

Citations

5

References

1997

Year

S. V. Springham, T. Osipowicz, J.L. Sanchez, Luis Gan, F. Watt
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

References

YearCitations

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