Diffusion of silicon in titanium nitride films. Efficiency of TiN barrier layers

Diffusion barriers in thin films

M.−A. Nicolet · Thin Solid Films · 1978 · 681 citations

Materials Science, Engineering, Diffusion Resistance +5

Investigation of reactively sputtered TiN films for diffusion barriers

S. Kanamori · Thin Solid Films · 1986 · 181 citations

Materials Science, Materials Engineering, Tin Films +6

TiN formed by evaporation as a diffusion barrier between Al and Si

C. Y. Ting · Journal of Vacuum Science and Technology · 1982 · 168 citations

Aluminium Nitride, Engineering, Material Innovation +18

High-temperature contact structures for silicon semiconductor devices

M. Wittmer · Applied Physics Letters · 1980 · 111 citations

Engineering, Thin Film Process Technology, Silicon On Insulator +17

Thermal stability of titanium nitride for shallow junction solar cell contacts

N.W. Cheung, H. von Seefeld, M.−A. Nicolet et al. · Journal of Applied Physics · 1981 · 86 citations

Materials Science, Semiconductors, Electrical Engineering +15