Concepedia
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1992 · 25 citations · 20 references
Ion ImplantationEngineeringPhysicsNanoelectronicsAxial ChannelingApplied PhysicsAtomic PhysicsSilicon On InsulatorMicroelectronicsBorophene
20
Computer simulation of atomic-displacement cascades in solids in the binary-collision approximation
Mark T. Robinson, Ian M. Torrens · Physical review. B, Solid state · 1974 · 1.6K citations
Engineering, Mechanical Engineering, Material Simulation +23
Computer studies of the reflection of light ions from solids
O.S. Oen, Mark T. Robinson · Nuclear Instruments and Methods · 1976 · 672 citations
Engineering, Physics, Optical Properties +11
Channeling of medium-mass ions through silicon
F. H. Eisen · Canadian Journal of Physics · 1968 · 208 citations
Ion Implantation, Medium-mass Ions, Nuclear Physics +13
Range Measurements in Oriented Tungsten Single Crystals (0.1-1.0 MeV). I. Electronic and Nuclear Stopping Powers
L. Eriksson, John Davies, P. Jespersgaard · Physical Review · 1967 · 136 citations
Range Distributions, Range Dispersion, Engineering +14
Implantation damage and the anomalous transient diffusion of ion-implanted boron
A. E. Michel, W. Rausch, Paul Ronsheim · Applied Physics Letters · 1987 · 100 citations
Point Defects, Engineering, Implantation Damage +16