Concepedia

R. Setola

RS

2

Publications

48

Citations

2

H-Index

1991

Active since

Affiliations

Institute for Microelectronics and Microsystems(Current)

R. Setola is an author at Institute for Microelectronics and Microsystems specializing in applied physics, physics, and engineering.

Top concepts

PhysicsEngineeringApplied PhysicsAtomic PhysicsSemiconductorsNanoelectronicsSurface ScienceMaterial ScienceMicroelectronicsCrystalline Defects

Publications per year

1991–1992

2

Publications

2

Axial channeling of boron ions into silicon

A. La Ferla, G. Galvagno, V. Raineri et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1992 · 25 citations

Ion Implantation, Engineering, Physics +7

High-energy channeling implants of phosphorus along the silicon [100] and [110] axes

V. Raineri, R. Setola, F. Priolo et al. · Physical review. B, Condensed matter · 1991 · 23 citations

Semiconductors, Materials Science, Ion Implantation +14

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