Concepedia

Silicon dioxide deposition in a microwave plasma reactor

N Benissad, C. Boisse-Laporte, C. Vallée, A. Granier, A. Goullet

Surface and Coatings Technology · 1999 · 53 citations · 13 references

DOI

Concepts

References

13

The identification of molecular spectra

Journal of the Franklin Institute · 1951 · 2.3K citations

, , +9

Infrared spectroscopic study of SiO<i>x</i> films produced by plasma enhanced chemical vapor deposition

P. G. Pai, S. S. Chao, Yasuo Takagi et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1986 · 799 citations

, , +17

Low-temperature growth of silicon dioxide films: A study of chemical bonding by ellipsometry and infrared spectroscopy

G. Lucovsky, M. J. Mantini, J. K. Srivastava et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1987 · 395 citations

, , +17

The identification of molecular spectra

Gerald J. Small · International Journal of Mass Spectrometry and Ion Physics · 1977 · 384 citations

, , +9

Mechanisms of plasma polymerization of various silico-organic monomers

Christiane Rau, W. Kulisch · Thin Solid Films · 1994 · 183 citations

, , +14