Mechanisms of plasma polymerization of various silico-organic monomers

Bonding in hydrogenated hard carbon studied by optical spectroscopy

B. Dischler, A. Bubenzer, P. Koidl · Solid State Communications · 1983 · 657 citations

Natural Sciences, Chemistry, Materials Science +12

Comparison of properties of dielectric films deposited by various methods

W. A. Pliskin · Journal of Vacuum Science and Technology · 1977 · 484 citations

Natural Sciences, Materials Engineering, Materials Science +17

Organosilicon Polymers. III. Infrared Spectra of the Methylpolysiloxanes

Norman Wright, M. J. Hunter · Journal of the American Chemical Society · 1947 · 242 citations

Natural Sciences, Chemistry, Materials Science +14

Plasma enhanced chemical vapor deposition: Differences between direct and remote plasma excitation

G. Lucovsky, D. V. Tsu · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1987 · 177 citations

Natural Sciences, Materials Engineering, Materials Science +15

Applied Infrared Spectroscopy

Lester Chafetz · Journal of Pharmaceutical Sciences · 1967 · 114 citations