Statistics
Publications
3
Citations
183
H-Index
3
Active since
1999
N Benissad is an author at Laboratoire de Physique des Gaz et des Plasmas specializing in materials science, plasma-enhanced deposition, and silicon dioxide.
Publications per year
1999–2001
3
3
Silicon dioxide deposition in a microwave plasma reactor
N Benissad, C. Boisse-Laporte, C. Vallée et al. · Surface and Coatings Technology · 1999 · 53 citations
Structure and properties of silicon oxide films deposited in a dual microwave-rf plasma reactor
N Benissad, K. Aumaille, A. Granier et al. · Thin Solid Films · 2001 · 25 citations · Full text
1–3 of 3