Concepedia

Fabrication and characterization of a micromachined passive valve

Daniel C. S. Bien, S.J.N. Mitchell, H.S. Gamble

Journal of Micromechanics and Microengineering · 2003 · 41 citations · 16 references

Concepts

EngineeringMechanical EngineeringFluid DynamicsMicroelectromechanical SystemsMicrofabricationFlow MeasurementMems ActuatorsMems CharacterizationMems DesignMicrofabrication ProcessesMicromachiningFluid Flow AnalysisGas FlowLiquid FlowMicrovalve DesignMicrovalvesPolycrystalline SiliconSemiconductor Device CharacterizationSilicon Micromachining

Abstract

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References

16

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Engineering, Bioengineering, Fluid Dynamics +16

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Engineering, Chemical Engineering, Mechanical Engineering +17

Normally closed microvalve and mircopump fabricated on a silicon wafer

Masayoshi Esashi, Shuichi Shoji, Akira Nakano · Sensors and Actuators · 1989 · 152 citations

Engineering, Electrical Engineering, Materials Science +12

Microdiffusers as dynamic passive valves for micropump applications

Torsten Gerlach · Sensors and Actuators A Physical · 1998 · 144 citations

Engineering, Mechanical Engineering, Fluid Dynamics +13

Micronozzle/diffuser flow and its application in micro valveless pumps

Xiaoning Jiang, Zheng Zhou, X. Y. Huang et al. · Sensors and Actuators A Physical · 1998 · 128 citations

Engineering, Chemical Engineering, Fluid Dynamics +12