Fabrication and characterization of a micromachined passive valve - Concepedia

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Fabrication and characterization of a micromachined passive valve

41

Citations

16

References

2003

Year

Daniel C. S. Bien, S.J.N. Mitchell, H.S. Gamble

Journal of Micromechanics and Microengineering

Abstract

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References

	Year	Citations
Microfluidics-a review Peter Gravesen, J. Branebjerg, O S Jensen Journal of Micromechanics and Microengineering EngineeringMicromachinesMicrofabricationFluid MechanicsMechanical Engineering	1993	1K
Microflow devices and systems Sunao Shoji, Masayoshi Esashi Journal of Micromechanics and Microengineering Flow ControlEngineeringMicromachinesMicrofabricationFluid Mechanics	1994	494
Normally closed microvalve and mircopump fabricated on a silicon wafer Masayoshi Esashi, Shuichi Shoji, Akira Nakano Sensors and Actuators Wafer Scale ProcessingEngineeringMicrofabricationApplied PhysicsSilicon Wafer	1989	151
Microdiffusers as dynamic passive valves for micropump applications Torsten Gerlach Sensors and Actuators A Physical EngineeringMicrofabricationDynamic Passive ValvesMechanical SystemsFluid Power	1998	144
Micronozzle/diffuser flow and its application in micro valveless pumps Xiaoning Jiang, Zheng Zhou, X. Y. Huang, Sensors and Actuators A Physical Micronozzle/diffuser FlowEngineeringPorous MediaFluid PowerMicroscale System	1998	127
Micromachined silicon microvalve T.R. Ohnstein, Takeshi Fukiura, Jeff A. Ridley, EngineeringFlow ControlMicromachinesMicrofabricationPneumatic Flow Control	2002	110
Development of a MEMS microvalve array for fluid flow control Nelsimar Vandelli, D. Wróblewski, Margo Velonis, Journal of Microelectromechanical Systems EngineeringFlow ControlFluid MechanicsMechanical EngineeringMicroelectromechanical Systems	1998	99
A Parylene micro check valve Xuan-Qi Wang, Qiao Lin, Yu‐Chong Tai EngineeringMicromachinesMicrofabricationMechanical EngineeringPneumatics	1999	95
Design, fabrication, and testing of micromachined silicone rubber membrane valves Xing Yang, Charles Grosjean Journal of Microelectromechanical Systems Power ConsumptionEngineeringSoft RoboticsFlexible ElectronicsMicrofabrication	1999	92
A batch-fabricated non-reverse valve with cantilever beam manufactured by micromachining of silicon J Tirén, L Tenerz, Bertil Hök Sensors and Actuators EngineeringMicromachinesMicrofabricationMechanical EngineeringBatch-fabricated Non-reverse Valve	1989	60

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