Concepedia
Sensors and Actuators · 1989 · 152 citations · 2 references
EngineeringElectrical EngineeringMaterials ScienceMicroelectronicsMicrofabricationSemiconductor DevicesMems FabricationMicrofabrication ProcessesMicrofluidic Device FabricationMicrofluidic DevicesMicrofluidic SystemsMicrofluidicsMicrovalvesSilicon Wafer ProcessingSilicon Wafers
2
Integrated movable micromechanical structures for sensors and actuators
L.-S. Fan, R.S. Muller · IEEE Transactions on Electron Devices · 1988 · 296 citations
Engineering, Materials Science, Mechanical Engineering +17
Prototype miniature blood gas analyser fabricated on a silicon wafer
Shuichi Shoji, Masayoshi Esashi, Tadayuki Matsuo · Sensors and Actuators · 1988 · 119 citations
Engineering, Bioengineering, Biomedical Engineering +14